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KOKO Ontology
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Alphabetical
Hierarchy
Groups
New
entiteter
fysiska objekt
icke-levande objekt
tekniska objekt (fysiska)
tunnfilm
Preferred term
tunnfilm
Type
Allfo-begrepp
Broader concept
tekniska objekt (fysiska)
Related concepts
atomlagerdeposition
kemisk gasfasdeponering
membran (teknik)
molekyllagerdeponering
In other languages
English
thin films
Finnish
ohutkalvot
URI
http://www.yso.fi/onto/koko/p4438
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Created 2/9/93, last modified 2/8/23