Preferred term
atomic layer deposition
Type
- YSO Concept
Broader concept
In other languages
Finnish
- atomikerroskasvatus
- ALD-menetelmä
- ALD-tekniikka
Swedish
- atomlagerdeposition
- ALD-metoden
- ALD-teknik
- atomlagerdeponering
URI
http://www.yso.fi/onto/koko/p72619