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KOKO Ontology
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Hierarchy
Groups
New
...
events and action
action
action with an object
treatment and handling
surface treatment
surfacing (activity)
chemical vapour deposition
molecular layer deposition
...
alteration
treatment and handling
surface treatment
surfacing (activity)
chemical vapour deposition
molecular layer deposition
Preferred term
molecular layer deposition
Type
YSO Concept
Broader concept
chemical vapour deposition
Related concepts
atomic layer deposition
thin films
In other languages
Finnish
molekyylikerroskasvatus
Swedish
molekyllagerdeponering
URI
http://www.yso.fi/onto/koko/p89146
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Created 6/17/20, last modified 2/5/21