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KOKO Ontology
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Hierarchy
Groups
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events and action
action
action with an object
manufacturing
microfabrication
lithography (microfabrication)
materiaalista luonti
manufacturing
microfabrication
lithography (microfabrication)
Preferred term
lithography (microfabrication)
Type
YSO Concept
Broader concept
microfabrication
Narrower concepts
nanolithography
photolithography (microfabrication)
Entry terms
microlithography
In other languages
Finnish
litografia (mikrovalmistus)
Swedish
litografi (mikrotillverkning)
URI
http://www.yso.fi/onto/koko/p90906
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Created 6/16/21, last modified 12/17/21