Preferred term
mikrosysteemit (mikrotekniikka)
Type
- YSO-käsite
Broader concept
Entry terms
- MEMS
In other languages
English
- micro-electromechanical systems
- MEMS
- microelectromechanical systems
Swedish
- mikrosystem (mikroteknik)
- MEMS
- mikroelektromekaniska system
URI
http://www.yso.fi/onto/koko/p96849