Preferred term
nanolithography
Type
- http://www.yso.fi/onto/yso-meta/Concept
Broader concept
Entry terms
- nanoimprint lithography
Belongs to group
In other languages
Finnish
- nanolitografia
- nanopainatuslitografia
Swedish
- nanolitografi
- nanotrycklitografi
URI
http://www.yso.fi/onto/yso/p38917