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YSO - General Finnish ontology
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Hierarchy
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events and action
action
action with an object
manufacturing
microfabrication
lithography (microfabrication)
photolithography (microfabrication)
Preferred term
photolithography (microfabrication)
Type
General concept
Broader concept
lithography (microfabrication)
Related concepts
nanolithography
Entry terms
optical lithography (microfabrication)
Belongs to group
41 Electrical Engineering. Electronics
In other languages
Finnish
optinen litografia (mikrovalmistus)
Swedish
optisk litografi (mikrotillverkning)
URI
http://www.yso.fi/onto/yso/p38923
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Created 6/18/20, last modified 8/28/21