Preferred term
etching (microfabrication)
Type
- General concept
Broader concept
Entry terms
- etching (nanofabrication)
Belongs to group
In other languages
Finnish
- etsaus (mikrovalmistus)
- etsaus (nanovalmistus)
Swedish
- etsning (mikrotillverkning)
- etsning (nanotillverkning)
URI
http://www.yso.fi/onto/yso/p39321